Oxford Physics

Virtual Laboratory : Clean Room

We operate a clean room for processing semiconductor samples for a variety of electrical and optical measurements.  These include making lateral superlattices, vertical tunnel structures, photovoltaic cells and small Hall bars. The equipment currently includes:

  • Resist spinners.

  • A Mask aligner

  • Optical microscopes

  • An electron microscope used for direct write patterns.

  • Two Reactive Ion Etchers.